2 results
Evidence for Oxygen Concentration Changes Induced by Low-Temperature 0–18 Implantation into a SIMOX Buried-Oxide Layer
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- Journal:
- MRS Online Proceedings Library Archive / Volume 107 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 141
- Print publication:
- 1987
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- Article
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Determination of the Nitrogen Content of as-Implanted and Annealed SIMOX Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 107 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 151
- Print publication:
- 1987
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- Article
- Export citation